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BibTeX entries:

@ARTICLE{Kapran:23:Investigation,
	 author = {Kapran, A. AND Antunes, V.G. AND Hubička, Z. AND Ballage, C. AND Minea, T.},
	 title = {Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths},
	 journal = {J. Vac. Sci. Technol. A },
	 fulljournal = {Journal of Vacuum Science & Technology A},
	 volume = {41},
	 number = {1},
	 pages = {013003},
	 eid = {013003},
	 year = {2023},
	 issn = {0734-2101,1520-8559},
	 doi = {10.1116/6.0002309},
	 KFPPid = {2454},
}

Bibitems:

\bibitem[{Kapran et~al.(2023)}]{Kapran:23:Investigation}
Kapran, A., Antunes, V.G., Hubička, Z., Ballage, C., Minea, T., Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths. {\it J. Vac. Sci. Technol. A .} {\bf 41}(1): 013003, 2023.