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BibTeX entries:
@ARTICLE{Kapran:23:Investigation,
author = {Kapran, A. AND Antunes, V.G. AND Hubička, Z. AND Ballage, C. AND Minea, T.},
title = {Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths},
journal = {J. Vac. Sci. Technol. A },
fulljournal = {Journal of Vacuum Science & Technology A},
volume = {41},
number = {1},
pages = {013003},
eid = {013003},
year = {2023},
issn = {0734-2101,1520-8559},
doi = {10.1116/6.0002309},
KFPPid = {2454},
}
Bibitems:
\bibitem[{Kapran et~al.(2023)}]{Kapran:23:Investigation}
Kapran, A., Antunes, V.G., Hubička, Z., Ballage, C., Minea, T., Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths. {\it J. Vac. Sci. Technol. A .} {\bf 41}(1): 013003, 2023.