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BibTeX entries:
@ARTICLE{Zanáška:19:In-situ,
author = {Zanáška, M. AND Kudrna, P. AND Čada, M. AND Tichý, M. AND Hubička, Z.},
title = {In-situ impedance spectroscopy of a plasma-semiconductor thin film system during reactive sputter deposition},
journal = {J. Appl. Phys.},
fulljournal = {JOURNAL OF APPLIED PHYSICS},
volume = {126},
number = {2},
pages = {023301},
eid = {023301},
year = {2019},
issn = {0021-8979},
doi = {10.1063/1.5102163},
KFPPid = {1983},
}
Bibitems:
\bibitem[{Zanáška et~al.(2019)}]{Zanáška:19:In-situ}
Zanáška, M., Kudrna, P., Čada, M., Tichý, M., Hubička, Z., In-situ impedance spectroscopy of a plasma-semiconductor thin film system during reactive sputter deposition. {\it J. Appl. Phys.} {\bf 126}(2): 023301, 2019.