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BibTeX entries:

@ARTICLE{Kot:19:Comparison,
	 author = {Kot, M. AND Henkel, K. AND Naumann, F. AND Gargouri, H. AND Lupina, L. AND Wilker, V. AND Kus, P. AND Poz´arowska, E. AND Garain, S. AND Rouissi, Z. AND Schmeißer, D.},
	 title = {Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources},
	 journal = {Journal of Vacuum Science & Technology A},
	 fulljournal = {Journal of Vacuum Science & Technology A},
	 volume = {37},
	 number = {2},
	 pages = {020913},
	 eid = {020913},
	 year = {2019},
	 issn = {0734-2101},
	 doi = {10.1116/1.5079628},
	 KFPPid = {1932},
}

Bibitems:

\bibitem[{Kot et~al.(2019)}]{Kot:19:Comparison}
Kot, M., Henkel, K., Naumann, F., Gargouri, H., Lupina, L., Wilker, V., Kus, P., Poz´arowska, E., Garain, S., Rouissi, Z., Schmeißer, D., Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources. {\it Journal of Vacuum Science & Technology A.} {\bf 37}(2): 020913, 2019.