Student: Naiko Iryna
Školitel: Doc. Mgr. Pavel Kudrna, Dr.
Konzultant: Mgr. Zdeněk Hubička, Ph.D., FZU AV ČR
Stav práce: zadaná
Anotace:
The aim of the dissertation is to investigate plasma of the glow discharge in hollow cathode plasma jet and in magnetron system. In industry and technology such plasma sources are used for a thin films deposition with different unique chemical and physical properties and surface morphology. One of the main aims of PhD work is an investigation of metal-oxide thin films deposited by reactive sputtering in the mentioned systems. The surface morphology, chemical composition and crystalline structure of deposited thin films will be investigated by the following experimental techniques: scanning electron microscope (SEM), atomic force microscope (AFM) and transmission electron microscope (TEM). The combination of these methods can give gave complex information about the thin film surface properties and the impact of the different plasma parameters on them. The energy dispersive analysis (EDX) is expected to be used for detection of impurities and correspondence of atomic concentration of different elements to the stoichiometry of created films. The diagnostics of chemical composition of thin film will be carried out by means of X-ray photo electron spectroscope (XPS) in order to check the existing chemical bonds on the surface. Further, the crystalline structure of thin films will be studied using both X-ray diffraction (XRD) and TEM methods. In addition the in-situ diagnostic of processing plasmas is expected to be performed by the diagnostic methods available in the supervisor’s laboratory. As part of postgraduate studies there is scheduled a scholarship abroad following the current travel possibilities/restrictions. The scholarship is conditioned by excellent study results. Prerequisites and co-requisites: Basic knowledge of low-temperature plasma physics and plasma diagnostics (can be acquired during the first year of study by attending recommended lectures), experimental skills, motivation.
Literature:
M.A. Liberman, A.J. Lichtenberg: Principles of plasma discharges and materials processing, Wiley Interscience, 2005.
I.H. Hutchinson:Principles of Plasma Diagnostics 2nd Edition, Cambridge University Press, 2002.
Other literature according to the recommendation of supervisor.