Student: Mishra Himanshu
Supervisor: Doc. Mgr. Pavel Kudrna, Dr.
ConsultantProf. RNDr. Milan Tichý, DrSc.
Status: Assigned
Abstract:
The aim of the dissertation is to study the relationship between external discharge parameters - macroparameters - (DC voltage on discharge, discharge current, or high frequency power consumed in discharge and composition of neutral gas of discharge) and local plasma parameters – electron temperature and concentration and electron distribution function - in several types of plasma chemical equipment (continuous and pulse discharge mode in a reactor with a high-frequency or direct –current plasma nozzle and its combinations, HiPIMS discharge in a cylindrical magnetron). The properties of materials in the form of thin layers deposited in these devices will also be studied.
The methodology of the cylindrical and flat probe in low-temperature plasma (and possibly also in the magnetic field) has already been verified at the workplace of the Department of Surface and Plasma Physics, MFF UK, and basic methodological procedures have been developed. There is a reactor with a high-frequency plasma nozzle and a cylindrical magnetron system equipped with probe diagnostics and a mass spectrometer. The focus of the dissertation is in experimental work. Cooperation with the Institute of Physics, or other institutes of the ASCR is assumed for the diagnosis of the created materials.
As part of postgraduate studies there is scheduled a scholarship abroad following the current travel possibilities/restrictions. The scholarship is conditioned by excellent study results.